MEMS piezoresistive flow sensors for sleep apnea therapy
Abbasnejad B., Thorby W., Razmjou A., Jin D., Asadnia M., Ibragimi V. M. M.
Sensors and Actuators A: Physical
Vol.279, P. 577-585
Опубликовано: 2018
Тип ресурса: Статья
DOI:10.1016/j.sna.2018.06.038
Аннотация:
A MEMS liquid crystal polymer (LCP), used in the membrane-based pressure sensor, has been found highly useful as a flow sensor. Here we conducted a set of elaborate experiments using an air flow generator to investigate the potential of our LCP flow sensor for sleep apnea therapy. Critical properties of the LCP flow sensor, including flow range, resolution (sensitivity), accuracy, and response time, have been systematically characterized. As a result, LCP flow sensor achieves a limit of detection of 8 LPM to measure flow rate, better than the commercial flow sensor (>10 LPM). Our LCP flow sensor shows a favourable response in a large flow range (8–160 LPM) with a sensitivity of detecting a linear voltage response of 0.004 V per 1 LPM flow rate. With minimum detectable flow, high sensitivity and resolution, we further demonstrated our LCP flow sensor for detecting human respiration. Moreover, using a two- dimensional simulation in COMSOL Multiphysics, we demonstrated the deformation of
Ключевые слова:
Breath analyzer; Liquid crystal polymer; MEMS flow sensor
Flow rate; Strain gages; Breath analyzers; Comsol multiphysics; Critical properties; Flow-sensors; Human respiration; Limit of detection; Resistance change; Two-dimensional simulations; Liquid crystal polymers
Язык текста: Английский
ISSN: 0924-4247
Abbasnejad B.
Thorby W.
Razmjou A.
Jin D.
Asadnia M.
Ibragimi V. M. M. Varkiani Madzhid Modzhtaba 1983-
Аббаснейад Б.
Тхорбy W.
Размйоу А.
Йин Д.
Асадниа М.
Ибрагими В. М. М. Варкиани Маджид Моджтаба 1983-
MEMS piezoresistive flow sensors for sleep apnea therapy
Текст визуальный непосредственный
Sensors and Actuators A: Physical
Elsevier Science Publisher B.V.
Vol.279 P. 577-585
2018
Статья
Breath analyzer Liquid crystal polymer MEMS flow sensor
Flow rate Strain gages Breath analyzers Comsol multiphysics Critical properties Flow-sensors Human respiration Limit of detection Resistance change Two-dimensional simulations Liquid crystal polymers
A MEMS liquid crystal polymer (LCP), used in the membrane-based pressure sensor, has been found highly useful as a flow sensor. Here we conducted a set of elaborate experiments using an air flow generator to investigate the potential of our LCP flow sensor for sleep apnea therapy. Critical properties of the LCP flow sensor, including flow range, resolution (sensitivity), accuracy, and response time, have been systematically characterized. As a result, LCP flow sensor achieves a limit of detection of 8 LPM to measure flow rate, better than the commercial flow sensor (>10 LPM). Our LCP flow sensor shows a favourable response in a large flow range (8–160 LPM) with a sensitivity of detecting a linear voltage response of 0.004 V per 1 LPM flow rate. With minimum detectable flow, high sensitivity and resolution, we further demonstrated our LCP flow sensor for detecting human respiration. Moreover, using a two- dimensional simulation in COMSOL Multiphysics, we demonstrated the deformation of